JPH0339838U - - Google Patents
Info
- Publication number
- JPH0339838U JPH0339838U JP10125989U JP10125989U JPH0339838U JP H0339838 U JPH0339838 U JP H0339838U JP 10125989 U JP10125989 U JP 10125989U JP 10125989 U JP10125989 U JP 10125989U JP H0339838 U JPH0339838 U JP H0339838U
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- tank
- piping section
- branch
- branched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10125989U JPH0339838U (en]) | 1989-08-29 | 1989-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10125989U JPH0339838U (en]) | 1989-08-29 | 1989-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0339838U true JPH0339838U (en]) | 1991-04-17 |
Family
ID=31650219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10125989U Pending JPH0339838U (en]) | 1989-08-29 | 1989-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0339838U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016042806A1 (ja) * | 2014-09-18 | 2016-03-24 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置 |
-
1989
- 1989-08-29 JP JP10125989U patent/JPH0339838U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016042806A1 (ja) * | 2014-09-18 | 2016-03-24 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置 |